JPH0350051U - - Google Patents
Info
- Publication number
- JPH0350051U JPH0350051U JP11013489U JP11013489U JPH0350051U JP H0350051 U JPH0350051 U JP H0350051U JP 11013489 U JP11013489 U JP 11013489U JP 11013489 U JP11013489 U JP 11013489U JP H0350051 U JPH0350051 U JP H0350051U
- Authority
- JP
- Japan
- Prior art keywords
- heating electrode
- substrate
- substrate heating
- porous layer
- nickel alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 229910000990 Ni alloy Inorganic materials 0.000 claims 2
- 229920006362 Teflon® Polymers 0.000 claims 1
- 238000005299 abrasion Methods 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013489U JPH0350051U (en]) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013489U JPH0350051U (en]) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350051U true JPH0350051U (en]) | 1991-05-15 |
Family
ID=31658686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11013489U Pending JPH0350051U (en]) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350051U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009010413A (ja) * | 2003-04-18 | 2009-01-15 | Hitachi Kokusai Electric Inc | 半導体製造装置および半導体装置の製造方法 |
-
1989
- 1989-09-20 JP JP11013489U patent/JPH0350051U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009010413A (ja) * | 2003-04-18 | 2009-01-15 | Hitachi Kokusai Electric Inc | 半導体製造装置および半導体装置の製造方法 |